The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2013

Filed:

Jun. 14, 2010
Applicants:

Craig M. Herzinger, Lincoln, NE (US);

Mathias M. Schubert, Lincoln, NE (US);

Tino Hofmann, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

John A. Woollam, Lincoln, NE (US);

Inventors:

Craig M. Herzinger, Lincoln, NE (US);

Mathias M. Schubert, Lincoln, NE (US);

Tino Hofmann, Lincoln, NE (US);

Martin M. Liphardt, Lincoln, NE (US);

John A. Woollam, Lincoln, NE (US);

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method of applying an ellipsometer or polarimeter system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz; wherein the ellipsometer or polarimeter system includes a source such as a backward wave oscillator, a Smith-Purcell cell, a free electron laser, an FTIR source or a solid state device; and a detector such as a Golay cell a bolometer or a solid state detector; and preferably includes at least one odd-bounce polarization state image rotating system and a polarizer, and at least one compensator and/or modulator, in addition to an analyzer.


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