The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2013

Filed:

Mar. 23, 2011
Applicant:

Toshiyuki Takewaki, Kanagawa, JP;

Inventor:

Toshiyuki Takewaki, Kanagawa, JP;

Assignee:

Renesas Electronics Corporation, Kawasaki-Shi, Kanagawa, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/48 (2006.01); H01L 23/52 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device, includes a semiconductor substrate, a first wiring layer formed on the semiconductor substrate, the first wiring layer containing a first via having a first aspect ratio and a first wire having a second aspect ratio, the first aspect ratio being equal to or larger than the second aspect ratio, and a second wiring layer overlying the first wiring layer, the second wiring layer containing a second via having a third aspect ratio and a second wire having a fourth aspect ratio, the third aspect ratio being smaller than the fourth aspect ratio.


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