The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 16, 2013

Filed:

Aug. 16, 2010
Applicants:

Yun-mi Lee, Yongin, KR;

Yong-sup Choi, Yongin, KR;

Hyun-sook Park, Yongin, KR;

Jong-heon Kim, Yongin, KR;

Jae-kwang Ryu, Yongin, KR;

Young-mook Choi, Yongin, KR;

Inventors:

Yun-Mi Lee, Yongin, KR;

Yong-Sup Choi, Yongin, KR;

Hyun-Sook Park, Yongin, KR;

Jong-Heon Kim, Yongin, KR;

Jae-Kwang Ryu, Yongin, KR;

Young-Mook Choi, Yongin, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/31 (2006.01); H01L 21/469 (2006.01); B05B 15/02 (2006.01); B05B 15/04 (2006.01); C23C 16/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A thin film deposition apparatus and a method of manufacturing an organic light-emitting display device by using the same, and more particularly, to a thin film deposition apparatus that can remove a deposition material deposited on a patterning slit sheet without performing an additional cleaning process, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus.


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