The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
Dec. 27, 2006
Akihiko Shirakawa, Chiba, JP;
Akihiko Shirakawa, Chiba, JP;
Showa Denko K.K., Tokyo, JP;
Abstract
A complex oxide film is provided having a high relative dielectric constant and capacitance having low temperature-dependency. The film thickness can be arbitrarily controlled. A manufacturing method thereof, a composite body comprising the complex oxide film and a manufacturing method thereof are provided. The complex oxide film containing titanium element and calcium element can be obtained by forming a metal oxide film containing titanium element on a substrate surface and then allowing a solution containing calcium ion to react with the metal oxide layer. A capacitor including the complex oxide film as dielectric material and a piezoelectric element including it as piezoelectric material can be produced.