The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2013
Filed:
Sep. 15, 2008
Itzhak Sapir, Irvine, CA (US);
Itzhak Sapir, Irvine, CA (US);
Aprolase Development Co., LLC, Wilmington, DE (US);
Abstract
A chip scale structure fabricated from known MEMS processes is provided including a pump actuator, a pump volume, pump membrane, a valve membrane, a valve aperture, and a valve actuator. The pump actuator may include a piezoelectric or piezoceramic disk. The valve actuator may be a piezoelectric or piezoceramic disk. A manifold plate with a valve aperture is disposed between the pump membrane and the valve membrane. One or more vacuum chambers are provided along a vacuum flow path or conduit in communication with the one or more vacuum chambers. The flow path comprises an inlet port and an outlet port where the inlet port is in communication with the separately provided vacuum environment. The outlet port is in commemoration with an external environment (e.g. non or lower-vacuum environment) for exhausting gases that are pulled from the separately provided vacuum environment to a separate location.