The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Mar. 02, 2009
Shingo Uchiyama, Kanagawa, JP;
Fusao Shimokawa, Kanagawa, JP;
Tomomi Sakata, Kanagawa, JP;
Nobuhiro Shimoyama, Kanagawa, JP;
Mitsuhiro Makihara, Kanagawa, JP;
Mitsuo Usui, Kanagawa, JP;
Shingo Uchiyama, Kanagawa, JP;
Fusao Shimokawa, Kanagawa, JP;
Tomomi Sakata, Kanagawa, JP;
Nobuhiro Shimoyama, Kanagawa, JP;
Mitsuhiro Makihara, Kanagawa, JP;
Mitsuo Usui, Kanagawa, JP;
Nippon Telegraph and Telephone Corporation, Tokyo, JP;
Abstract
A MEMS device includes a mirror substrate (), an electrode substrate () arranged so as to face the mirror substrate (), a mirror () serving as a movable member rotatably supported in an opening portion of the mirror substrate () via support members, a driving electrode () arranged on an insulating film () on a surface of the electrode substrate () facing the mirror substrate () so as to face the mirror () across a gap and drive the mirror (), and a lower electrode () made of a metal or a semiconductor and formed under the insulating film () exposed to the gap so as to be in contact with the insulating film ().