The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Dec. 02, 2011
Bin Xiao, Suzhou, CN;
Ping LV, Suzhou, CN;
Wei HU, Suzhou, CN;
Jia-xin Mei, Suzhou, CN;
Gang LI, Suzhou, CN;
Bin Xiao, Suzhou, CN;
Ping Lv, Suzhou, CN;
Wei Hu, Suzhou, CN;
Jia-Xin Mei, Suzhou, CN;
Gang Li, Suzhou, CN;
Memsensing Microsystems Technology Co., Ltd, Suzhou, Jiangsu Province, CN;
Abstract
A transverse acoustic wave resonator includes a base, a resonator component, a number of driving electrodes fixed to the base and a number of fixing portions connecting the base and the resonator component. The resonator component is suspended above a top surface of the base and is perpendicular to the base. The driving electrodes are coupling to side surfaces of the resonator component. The resonator component is formed in a shape of an essential regular polygon. The driving electrodes and the resonator component jointly form an electromechanical coupling system for converting capacitance into electrostatic force. Besides, a capacitive-type transverse extension acoustic wave silicon oscillator includes the transverse acoustic wave resonator and a method of fabricating the transverse acoustic wave resonator are also disclosed.