The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Jan. 14, 2010
Thomas Kirchmeier, Teningen, DE;
Michael Glueck, Freiburg, DE;
Hans-juergen Windisch, Ehrenkirchen, DE;
Hanns-joachim Knaus, Emmendingen, DE;
Thomas Kirchmeier, Teningen, DE;
Michael Glueck, Freiburg, DE;
Hans-Juergen Windisch, Ehrenkirchen, DE;
Hanns-Joachim Knaus, Emmendingen, DE;
HUETTINGER Elektronik GmbH + Co. KG, Freiburg, DE;
Abstract
Operation of a plasma supply device having at least one switching bridge with at least two switching elements, and configured to deliver a high frequency output signal having a power of >500 W and a substantially constant fundamental frequency >3 MHz to a plasma load is accomplished by determining at least one operating parameter, at least one environmental parameter of at least one switching element and/or a switching bridge parameter, determining individual drive signals for the switching elements taking into account the at least one operating parameter, the at least one environmental parameter and/or the switching bridge parameter, and individually driving the switching elements with a respective drive signal.