The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Sep. 18, 2008
Applicants:
Richard Ian Laming, Edinburgh, GB;
Colin Robert Jenkins, Edinburgh, GB;
Anthony Bernard Traynor, Livingston, GB;
Inventors:
Richard Ian Laming, Edinburgh, GB;
Colin Robert Jenkins, Edinburgh, GB;
Anthony Bernard Traynor, Livingston, GB;
Assignee:
Wolfson Microelectronics plc, Edinburgh, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01);
U.S. Cl.
CPC ...
Abstract
A MEMS device comprises a membrane layer and a back-plate layer formed over the membrane layer. The membrane layer comprises an outer portion and an inner portion raised relative to the outer portion and a sidewall for connecting the inner portion and the outer portion. The sidewall is non-orthogonal to the outer portion.