The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Jun. 10, 2009
Shen-chuan Lo, Hsinchu, TW;
Ming-wei Lai, Hsinchu, TW;
Shi-ri Lee, Hsinchu, TW;
Li-jiaun Lin, Hsinchu, TW;
Shen-Chuan Lo, Hsinchu, TW;
Ming-Wei Lai, Hsinchu, TW;
Shi-Ri Lee, Hsinchu, TW;
Li-Jiaun Lin, Hsinchu, TW;
Industrial Technology Research Institute, Hsinchu, TW;
Abstract
A method of processing objects by a FIB (Focused Ion Beam) system and a carrier used therewith are provided. The carrier includes a carrying member and a processing portion having an object disposed thereon. Before the carrier is disposed into the FIB system, the carrying member is set to be flush in height with the processing portion having the object disposed thereon. After an eucentric height adjustment inside the FIB system, both the carrying member and the processing portion are in a same plane with the eucentric point of the system. Therefore, after the object on the processing portion is processed, a processed object or a processed block of the object can be moved to the carrying member without performing further eucentric height adjustment with respect to the carrying member.