The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Apr. 29, 2008
Applicants:
Mehmet E. Alpay, Portland, OR (US);
Jeffrey Howerton, Portland, OR (US);
Michael Nashner, Portland, OR (US);
Ling Wen, Portland, OR (US);
Inventors:
Mehmet E. Alpay, Portland, OR (US);
Jeffrey Howerton, Portland, OR (US);
Michael Nashner, Portland, OR (US);
Ling Wen, Portland, OR (US);
Assignee:
Electro Scientific Industries, Inc., Portland, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 26/08 (2006.01); B23K 26/38 (2006.01); H01L 21/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for laser machining through micro-holes having desired geometric cross-section requirements in a thin, substantially homogenous material.