The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2013
Filed:
Sep. 28, 2006
James Robert Smith, Taunton, GB;
Marilena Radoiu, Lyons, FR;
Stephen John Coles, North Somerset, GB;
James Robert Smith, Taunton, GB;
Marilena Radoiu, Lyons, FR;
Stephen John Coles, North Somerset, GB;
Edwards Limited, Crawley, West Sussex, GB;
Abstract
In a method of treating a gas exhausted from a process chamber, the exhaust gas is conveyed to a vacuum pump () and a nitrogen purge gas is added to the exhaust gas for pumping with the exhaust gas. Gas exhaust from the pump is conveyed to an abatement device () for abating the exhaust gas. The amount of purge gas added to the exhaust gas is adjusted in response to a variation of the composition of the exhaust gas, or the composition of the gas supplied to the process chamber, to optimise the abatement of the exhaust gas.