The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Jun. 21, 2010
Katsuhito Nishimura, Atsugi, JP;
Yoichi Kawakami, Kusatsu, JP;
Mitsuru Funato, Kyoto, JP;
Akio Kaneta, Yasu, JP;
Tsuneaki Hashimoto, Ageo, JP;
Katsuhito Nishimura, Atsugi, JP;
Yoichi Kawakami, Kusatsu, JP;
Mitsuru Funato, Kyoto, JP;
Akio Kaneta, Yasu, JP;
Tsuneaki Hashimoto, Ageo, JP;
Kyoto University, Kyoto, JP;
Abstract
A scanning probe microscope includes: a first and second probes for scanning a sample while maintaining the distance to the sample surface; crystal oscillators holding each of the first and second probes; and a modulation oscillator for providing the first probe with a vibration of a specific frequency which is different from the resonant frequency of each crystal oscillator. A control unit monitors the vibration of the specific frequency of the first and second probes, detects proximity of the first probe and the second probe to each other based on the change of the specific frequencies, and controls the drive of the first and second probes.