The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2013

Filed:

Apr. 17, 2009
Applicants:

Eun Goo Kang, Seoul, KR;

Young Jae Choi, Seoul, KR;

Seok Woo Lee, Yongin-si, KR;

Sang Moo Lee, Yongin-si, KR;

Kyung Tae Nam, Yongin-si, KR;

Sang Hoon Ji, Seoul, KR;

Inventors:

Eun Goo Kang, Seoul, KR;

Young Jae Choi, Seoul, KR;

Seok Woo Lee, Yongin-si, KR;

Sang Moo Lee, Yongin-si, KR;

Kyung Tae Nam, Yongin-si, KR;

Sang Hoon Ji, Seoul, KR;

Assignee:

Korea Institute of Industrial Technology, Cheonan-si, Chungnam, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/083 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention relates to a stage, particularly to, a stage which is able to move minutely, having a rigidity-improved transfer part. A stage includes a work table on which a working object is placed, a motor configured to provide a rotational force, a shaft rotated by the motor to transfer the work table, a linear moving part configured to be expandable to linearly move the shaft in an axial direction, the linear moving part having a hollow to insert an end of the shaft therein, and an expanding part configured to be expandable as far as the shaft is moved by the linear moving part.


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