The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Jun. 27, 2012
Tomonori Ishikawa, Utsunomiya, JP;
Nobushige Korenaga, Utsunomiya, JP;
Tomonori Ishikawa, Utsunomiya, JP;
Nobushige Korenaga, Utsunomiya, JP;
Canon Kabushiki Kaisha, , JP;
Abstract
The drawing apparatus includes an optical system housing configured to emit a charged particle beam toward the substrate, a stage configured to hold the substrate and be moved at least in a direction perpendicular to an axis of the optical system housing, a detection device including a detector and a support for supporting the detector such that the detector faces a side surface of the stage, and configured for measuring a position of the stage, and a magnetic shield member provided to the stage and configured to shield an opening of the optical system housing that faces a top surface of the stage from a magnetic field. Here, the magnetic shield member is provided to the stage at a region, in a direction of the axis, other than a region where the detection device is provided.