The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2013

Filed:

Feb. 26, 2010
Applicants:

Miwa Kozawa, Kawasaki, JP;

Koji Nozaki, Kawasaki, JP;

Inventors:

Miwa Kozawa, Kawasaki, JP;

Koji Nozaki, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08K 5/15 (2006.01);
U.S. Cl.
CPC ...
Abstract

A resist pattern thickening material containing a resin, a cyclic compound expressed by the general formula 1, at least one of compounds expressed by the general formulae 2 to 3, respectively, and water:


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