The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2013
Filed:
Feb. 25, 2010
Applicants:
Sébastien Kerdiles, Saint Ismier, FR;
Walter Schwarzenbach, Saint Nazaire les Eymes, FR;
Aziz Alami-idrissi, Le Touvet, FR;
Inventors:
Sébastien Kerdiles, Saint Ismier, FR;
Walter Schwarzenbach, Saint Nazaire les Eymes, FR;
Aziz Alami-Idrissi, Le Touvet, FR;
Assignee:
Soitec, Bernin, FR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/30 (2006.01); H01L 21/78 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention relates to a method for transferring a layer from a donor substrate onto a handle substrate wherein, after detachment, the remainder of the donor substrate is reused. To get rid of undesired protruding edge regions which are due to the chamfered geometry of the substrates, the invention proposes to carry out an additional etching process before detachment occurs.