The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2013

Filed:

Jul. 22, 2010
Applicants:

Edward C. Cooney, Iii, Jericho, VT (US);

Jeffrey P. Gambino, Westford, VT (US);

Robert K. Leidy, Burlington, VT (US);

Charles F. Musante, South Burlington, VT (US);

John G. Twombly, Essex Junction, VT (US);

Inventors:

Edward C. Cooney, III, Jericho, VT (US);

Jeffrey P. Gambino, Westford, VT (US);

Robert K. Leidy, Burlington, VT (US);

Charles F. Musante, South Burlington, VT (US);

John G. Twombly, Essex Junction, VT (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/473 (2006.01); H01L 31/18 (2006.01);
U.S. Cl.
CPC ...
Abstract

Methods, structures, and design structures for improved adhesion of protective layers of imager microlens structures are disclosed. A method of fabricating a semiconductor structure includes forming an interfacial region between a microlens and a protective oxide layer. The interfacial region has a lower concentration of oxygen than the protective oxide layer.


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