The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Oct. 29, 2010
James P. Cruse, Santa Cruz, CA (US);
Dermot Cantwell, Sunnyvale, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Thorsten Kril, Santa Clara, CA (US);
Charles Hardy, San Jose, CA (US);
James P. Cruse, Santa Cruz, CA (US);
Dermot Cantwell, Sunnyvale, CA (US);
Michael R. Rice, Pleasanton, CA (US);
Thorsten Kril, Santa Clara, CA (US);
Charles Hardy, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Methods for monitoring processing equipment are provided herein. In some embodiments, a method for monitoring processing equipment when in an idle state for a period of idle time may include selecting a test from a list of a plurality of tests to perform on the processing equipment when the processing equipment is in the idle state, wherein the test has a total run time; starting the selected test; comparing a remaining idle time of the period of idle time to a remaining run time of the total run time as the selected test is performed; and determining whether to end the selected test prior to completing the total run time in response to the comparison.