The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jun. 30, 2011
Emmanuel P. Quevy, El Cerrito, CA (US);
Manu Seth, Berkeley, CA (US);
Mehrnaz Motiee, San Francisco, CA (US);
Emmanuel P. Quevy, El Cerrito, CA (US);
Manu Seth, Berkeley, CA (US);
Mehrnaz Motiee, San Francisco, CA (US);
Silicon Laboratories Inc., Austin, TX (US);
Abstract
A MEMS oscillator includes a resonator body and primary and secondary drive electrodes to electrostatically drive the resonator body. Primary and secondary sense electrodes sense motion of the resonator body. The primary and secondary drive and sense electrodes are configured to be used together during start-up of the MEMS oscillator. The secondary drive electrode and secondary sense electrode are disabled after start-up, while the primary drive and sense electrodes remain enabled to maintain oscillation.