The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 25, 2013

Filed:

Jan. 19, 2010
Applicants:

Yoshiharu Saegusa, Ichihara, JP;

Susumu Sugano, Ichihara, JP;

Inventors:

Yoshiharu Saegusa, Ichihara, JP;

Susumu Sugano, Ichihara, JP;

Assignee:

Toyoda Gosei Co., Ltd., Aichi-ken, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 21/66 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

An image pickup section picks up images of a pair of targets formed on a substrate with a cutting line interposed therebetween (S). An extracting section extracts the targets from the images (S). Then, a measuring section measures the distance dbetween the targets (S). When a driving section presses a blade against the substrate (S), the substrate is pressed by the blade to become warped and starts to break. Thus, the image pickup section picks up images of the targets again (S), and the extracting section extracts the targets from the images (S). The measuring section measures the distance dbetween the targets (S). A determining section determines the cutting state of the substrate from the amount of change (d−d) of the distances between the targets (S). Thereby, a method for cutting a substrate and a method for manufacturing electronic elements using the method are provided by which the cutting situation of the substrate can be judged at the time of cutting the substrate into chips by breaking.


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