The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Oct. 24, 2012
Applicant:
Powerchip Technology Corporation, Hsinchu, TW;
Inventors:
Assignee:
Powerchip Technology Corporation, Hsinchu Science Park, Hsinchu, TW;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract
A novel method for manufacturing a 3-D vertical memory comprising the steps of dividing a multilayer structure composed of insulating intermediate layers and sacrificial intermediate layers into a first multilayer structure and a second multilayer structure, replacing the sacrificial intermediate layers in the multilayer structures with metal intermediate layers, and manufacturing the channel structure in two multilayer structures.