The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2013
Filed:
Jun. 13, 2006
Applicants:
Sung Eun Kim, Woolsan-si, KR;
Tae Hyun Lim, Gyeongsangbuk-do, KR;
Hwan Kyu Yoo, Gyeonggi-do, KR;
Kwang Jong Yoo, Gyeonggi-do, KR;
Yang Sik Moon, Gyeonggi-do, KR;
Byeong Cheol an, Daegu-si, KR;
Inventors:
Sung Eun Kim, Woolsan-si, KR;
Tae Hyun Lim, Gyeongsangbuk-do, KR;
Hwan Kyu Yoo, Gyeonggi-do, KR;
Kwang Jong Yoo, Gyeonggi-do, KR;
Yang Sik Moon, Gyeonggi-do, KR;
Byeong Cheol An, Daegu-si, KR;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01);
U.S. Cl.
CPC ...
Abstract
A sputtering apparatus for depositing a target material on a substrate includes a chamber, a target in the chamber to provide the target material, a carrier to carry the substrate in the chamber to face the target, and a plurality of masks arranged along sides of the carrier and being movable back and forth with respect to the carrier.