The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Nov. 18, 2009
Soichiro Hiraoka, Hyogo, JP;
Jirou Terada, Osaka, JP;
Shinsuke Nakazono, Osaka, JP;
Kiyomi Furukawa, Osaka, JP;
Soichiro Hiraoka, Hyogo, JP;
Jirou Terada, Osaka, JP;
Shinsuke Nakazono, Osaka, JP;
Shigeo Furukawa, Osaka, JP;
Panasonic Corporation, Osaka, JP;
Abstract
An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.