The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Nov. 05, 2009
Yoshiyuki Usui, Utsunomiya, JP;
Yoshiyuki Usui, Utsunomiya, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An apparatus which illuminates an original by an illumination optical system and projects a pattern of the original onto a substrate. The apparatus includes a measuring device configured to measure the light intensity distribution, a detector configured to detect a total light quantity on the pupil plane, and a controller configured to determine a light quantity, to be detected when a target light intensity distribution is formed on the pupil plane, as a target light quantity based on the measured light intensity distribution and the detected total light quantity, and to control the adjusting mechanism so that the detected total light quantity becomes the target light quantity. The illumination optical system includes an adjusting mechanism configured to adjust a light intensity distribution on a pupil plane of the projection optical system.