The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 11, 2013

Filed:

Aug. 04, 2011
Applicants:

Petrus Antonius Thomas Marinus Vermeeren, Eindhoven, NL;

Kim Phan Le, Eindhoven, NL;

Inventors:

Petrus Antonius Thomas Marinus Vermeeren, Eindhoven, NL;

Kim Phan Le, Eindhoven, NL;

Assignee:

NXP B.V., Eindhoven, NL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H03B 5/30 (2006.01); G04C 3/06 (2006.01);
U.S. Cl.
CPC ...
Abstract

A piezoresistive MEMS oscillator comprises a resonator body, first and second drive electrodes located adjacent the resonator body for providing an actuation signal; and at least a first sense electrode connected to a respective anchor point. The voltages at the electrodes are controlled and/or processed such that the feedthrough AC current from one drive electrode to the sense electrode is at least partially offset by the feedthrough AC current from the other drive electrode to the sense electrode.


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