The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Nov. 09, 2010
Johannes Classen, Reutlingen, DE;
Arnd Kaelberer, Schlierbach, DE;
Hans-joerg Faisst, Kirchentellinsfurt, DE;
Axel Franke, Ditzingen, DE;
Mirko Hattass, Stuttgart, DE;
Holger Rank, Ditzingen, DE;
Robert Sattler, Regensburg, DE;
Alexander Buhmann, Stuttgart, DE;
Ramona Maas, Kaiserslautern, DE;
Marian Keck, Leonberg, DE;
Johannes Classen, Reutlingen, DE;
Arnd Kaelberer, Schlierbach, DE;
Hans-Joerg Faisst, Kirchentellinsfurt, DE;
Axel Franke, Ditzingen, DE;
Mirko Hattass, Stuttgart, DE;
Holger Rank, Ditzingen, DE;
Robert Sattler, Regensburg, DE;
Alexander Buhmann, Stuttgart, DE;
Ramona Maas, Kaiserslautern, DE;
Marian Keck, Leonberg, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A method for determining the sensitivity of a sensor provides the following steps: a) first and second deflection voltages are applied to first and second electrode systems of the sensor, respectively, and first and second electrostatic forces are exerted on an elastically suspended seismic mass of the sensor by the first and second electrode systems, respectively, and a restoring force is exerted on the mass as a result of the elasticity of the mass, and a force equilibrium is established among the first and second electrostatic forces and the restoring force, and the mass assumes a deflection position characteristic of the force equilibrium, and an output signal characteristic of the force equilibrium and of the deflection position is measured; and b) the sensitivity of the sensor is computed on the basis of the first and second deflection voltages.