The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Jun. 10, 2010
Jong Seok Seo, Chungcheongnam-do, KR;
Jaeseung Go, Gyeonggi-do, KR;
Jong Seok Seo, Chungcheongnam-do, KR;
Jaeseung Go, Gyeonggi-do, KR;
Semes Co., Ltd., Chungcheongnam-Do, KR;
Abstract
Provided are a substrate heating unit heating a substrate, and a substrate treating apparatus including the same. The substrate heating unit heats the substrate by transferring heat generated from a resistance heat generating member to a supporting plate. The supporting plate includes an upper plate having a central region which is thicker than an edge region thereof, and a lower plate made of a material having a thermal conductivity lower than the material of the upper plate. By a difference in the shape and material of the upper plate and lower plate, heat arrives at the substrate more rapidly in the edge region than in the central region, so that an entire surface of the substrate is heated uniformly.