The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Apr. 18, 2011
Lars Markwort, Haimhausen, DE;
Pierre-yves Guittet, Munich, DE;
Sandip Halder, Leuven, BE;
Anne Jourdain, Leuven, BE;
Lars Markwort, Haimhausen, DE;
Pierre-Yves Guittet, Munich, DE;
Sandip Halder, Leuven, BE;
Anne Jourdain, Leuven, BE;
Nanda Technologies GmbH, Unterschleissheim, DE;
IMEC, Leuven, BE;
Abstract
A method of inspecting a semiconductor substrate having a back surface and including at least one piece of metal embedded in the substrate comprises directing measuring light towards the back surface of the substrate and detecting a portion of the measuring light received back from the substrate. The method also includes determining a distance between the piece of metal and the back surface based upon the detected measuring light received back from the substrate.