The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Nov. 28, 2008
Yoichiro Tabata, Tokyo, JP;
Yujiro Okihara, Tokyo, JP;
Tetsuya Saitsu, Tokyo, JP;
Noriyuki Nakamura, Tokyo, JP;
Ryohei Ueda, Tokyo, JP;
Koji Ota, Tokyo, JP;
Yasuhiro Tanimura, Tokyo, JP;
Yoichiro Tabata, Tokyo, JP;
Yujiro Okihara, Tokyo, JP;
Tetsuya Saitsu, Tokyo, JP;
Noriyuki Nakamura, Tokyo, JP;
Ryohei Ueda, Tokyo, JP;
Koji Ota, Tokyo, JP;
Yasuhiro Tanimura, Tokyo, JP;
Toshiba Mitsubishi-Electric Industrial Systems Corporation, Tokyo, JP;
Mitsubishi Electric Corporation, Tokyo, JP;
Abstract
An apparatus for producing high-concentration ozone gas has a plurality of adsorption/desorption columns and a plurality of valves capable of switching opening/closing of the passage of gas flowing into or out of the adsorption/desorption columns, such that each of the adsorption/desorption columns can performs ozone adsorption processing, evacuation processing or desorption processing. At least two of the adsorption/desorption columns are placed in a serial cycle arrangement to constitute a main adsorption/desorption column group, and one or more of the other adsorption/desorption columns is placed in parallel with the main adsorption/desorption column group to constitute an auxiliary adsorption/desorption column. The auxiliary adsorption/desorption column performs desorption processing during a period in which none of the adsorption/desorption columns of the main adsorption/desorption column group is performing desorption processing.