The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
Feb. 20, 2009
Takahiro Kobiki, Ibara, JP;
Takahiro Kobiki, Ibara, JP;
Tazmo Co., Ltd., Okayama, JP;
Abstract
A conveyor robot () includes a main body (), a first arm (), and a second arm (). The first arm () is designed to be reciprocable between a wafer cassette and a position above the main body (). The first arm () is provided with a first hand () having a plurality of gripping portions designed to grip a wafer. The second arm () is designed to be reciprocable between a position above the main body () and a wafer stage. The second arm () is provided with a second hand () having a plurality of gripping portions designed to grip the wafer from a different angle than do the gripping portions of the first hand (). The gripping portions of the first hand () and those of the second hand () are positioned at equal height.