The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2013
Filed:
May. 24, 2011
Craig Lyle Stevens, Ben Lomond, CA (US);
David Eric Berkstresser, Los Gatos, CA (US);
Wendell Thomas Blonigan, Pleasanton, CA (US);
Craig Lyle Stevens, Ben Lomond, CA (US);
David Eric Berkstresser, Los Gatos, CA (US);
Wendell Thomas Blonigan, Pleasanton, CA (US);
Orbotech LT Solar, LLC., San Jose, CA (US);
Abstract
An apparatus and method for recovery and cleaning of broken substrates, for fabrication systems using silicon wafers. A placing mechanism moves a suction head to a location of the broken substrate and a suction pump coupled to a flexible hose is used to remove the broken pieces. A hood is positioned at the inlet of the suction head, and setback extensions are provided at the bottom of the hood to allow air flow into the inlet and prevent thermal conductance from the tray to the hood. Pins are extendable about the inlet of the suction head to enable breakage of the substrate to smaller pieces for removal.