The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8456614 B1

PDF
Full Text
Expired
Date of Patent:
Jun. 04, 2013

Filed:

Oct. 29, 2009
Applicant:

Hiroyuki Tomita, Utsunomiya, JP;

Inventor:

Hiroyuki Tomita, Utsunomiya, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); G03B 27/42 (2006.01); G03B 27/52 (2006.01); G03B 27/54 (2006.01);
U.S. Cl.
CPC ...
Abstract

The optical element supporting device of the present invention includes a first supporting member that supports the optical element, a second supporting member that supports the first supporting member at a plurality of locations, a plate spring fastened to the first supporting member and having a plate thickness extending in the optical axis direction of the optical element, and a force supplying unit, which is provided on the first supporting member, configured to provide a force in the optical axis direction applied to the plate spring at a location different from the plurality of locations, wherein the force supplying unit elastically deforms the first supporting member by receiving the reactive force generated by the force applied to the plate spring to thereby adjust the position of the optical element.


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Tomita, Hiroyuki. (2013). Optical element supporting device, exposure apparatus using same, and device manufacturing method (U.S. Patent No. 8456614). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8456614

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