The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Jan. 25, 2011
Brady J. Gibbons, Corvallis, OR (US);
Chris Shelton, Portland, OR (US);
Peter Mardilovich, Corvallis, OR (US);
Tony S. Cruz-uribe, Independence, OR (US);
Brady J. Gibbons, Corvallis, OR (US);
Chris Shelton, Portland, OR (US);
Peter Mardilovich, Corvallis, OR (US);
Tony S. Cruz-Uribe, Independence, OR (US);
Hewlett-Packard Development Company, L.P., Houston, TX (US);
Abstract
A piezoelectric thin film device comprises a piezoelectric thin film having upper and lower surfaces and a defined tilted crystal morphology, a top electrode disposed on the upper surface, a substrate having a surface morphology that corresponds to the defined crystallographically tilted morphology, and a bottom electrode disposed between and crystallographically linked to both the lower surface of the piezoelectric thin film and the substrate surface, the bottom and top electrodes having a parallel planar configuration relative to the plane of the substrate and the defined crystallographically tilted morphology having a crystallographic c-axis direction oriented at a >0° angle relative to the normal to the plane of the electrodes; and method of making the device.