The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2013

Filed:

Dec. 29, 2010
Applicants:

Takamitsu Ishihara, Kanagawa-ken, JP;

Hideaki Aochi, Kanagawa-ken, JP;

Inventors:

Takamitsu Ishihara, Kanagawa-ken, JP;

Hideaki Aochi, Kanagawa-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01);
U.S. Cl.
CPC ...
Abstract

A nonvolatile semiconductor memory device includes a stacked body including electrode films stacked in a first direction; a conductive pillar piercing the stacked body in the first direction; an inner insulating film, a semiconductor pillar, an intermediate insulating film, a memory layer, and an outer insulating film provided between the conductive pillar and the electrode films. The inner insulating film is provided around a side face of the conductive pillar. The semiconductor pillar is provided around a side face of the inner insulating film. The intermediate insulating film is provided around a side face of the semiconductor pillar. The memory layer is provided around a side face of the intermediate insulating film. The outer insulating film is provided around a side face of the memory layer.


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