The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2013
Filed:
Sep. 07, 2011
Christopher Gage, Campbell, CA (US);
Charles E. Pomeroy, San Jose, CA (US);
David Cohen, San Jose, CA (US);
Nagarajan Kalyanasundaram, San Jose, CA (US);
Christopher Gage, Campbell, CA (US);
Charles E. Pomeroy, San Jose, CA (US);
David Cohen, San Jose, CA (US);
Nagarajan Kalyanasundaram, San Jose, CA (US);
Novellus Systems, Inc., Fremont, CA (US);
Abstract
Apparatuses and methods for cooling and transferring wafers from low pressure environment to high pressure environment are provided. An apparatus may include a cooling pedestal and a set of supports for holding the wafer above the cooling pedestal. The average gap between the wafer and the cooling pedestal may be no greater than about 0.010 inches. Venting gases may be used to increase the pressure inside the apparatus during the transfer. In certain embodiment, venting gases comprise nitrogen.