The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2013
Filed:
Apr. 17, 2012
Shinji Taniguchi, Tokyo, JP;
Tokihiro Nishihara, Tokyo, JP;
Masafumi Iwaki, Tokyo, JP;
Masanori Ueda, Tokyo, JP;
Tsuyoshi Yokoyama, Tokyo, JP;
Takeshi Sakashita, Tokyo, JP;
Motoaki Hara, Miyagi, JP;
Shinji Taniguchi, Tokyo, JP;
Tokihiro Nishihara, Tokyo, JP;
Masafumi Iwaki, Tokyo, JP;
Masanori Ueda, Tokyo, JP;
Tsuyoshi Yokoyama, Tokyo, JP;
Takeshi Sakashita, Tokyo, JP;
Motoaki Hara, Miyagi, JP;
Taiyo Yuden Co., Ltd., Tokyo, JP;
Abstract
A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the substrate and the lower electrode, an upper electrode provided on the piezoelectric film, and an additional pattern, a cavity being formed between the lower electrode and the substrate in a resonance portion in which the lower electrode and the upper electrode face each other through the piezoelectric film, the additional pattern being provided in a position that is on the lower electrode and includes an interface between the resonance portion and a non-resonance portion.