The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 28, 2013

Filed:

Jan. 11, 2011
Applicants:

Steve M. Savoy, Austin, TX (US);

Jeremy J. John, Austin, TX (US);

Daniel R. Mitchell, Austin, TX (US);

Michael K. Mcaleer, Austin, TX (US);

Inventors:

Steve M. Savoy, Austin, TX (US);

Jeremy J. John, Austin, TX (US);

Daniel R. Mitchell, Austin, TX (US);

Michael K. McAleer, Austin, TX (US);

Assignee:

Nanohmics, Inc., Austin, TX (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 27/414 (2006.01); H01L 27/088 (2006.01); H01L 21/203 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
G01N 27/4148 (2013.01); H01L 27/088 (2013.01); H01L 29/0673 (2013.01);
Abstract

An array of sensor devices, each sensor including a set of semiconducting nanotraces having a width less than about 100 nm is provided. Method for fabricating the arrays is disclosed, providing a top-down approach for large arrays with multiple copies of the detection device in a single processing step. Nanodimensional sensing elements with precise dimensions and spacing to avoid the influence of electrodes are provided. The arrays may be used for multiplex detection of chemical and biomolecular species. The regular arrays may be combined with parallel synthesis of anchor probe libraries to provide a multiplex diagnostic device. Applications for gas phase sensing, chemical sensing and solution phase biomolecular sensing are disclosed.


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