The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 21, 2013

Filed:

Mar. 27, 2009
Applicants:

Michael Wayne Quillen, Kingsport, TN (US);

Dale Edward O'dell, Blountville, TN (US);

Zachary Philip Lee, Conyers, GA (US);

John Cleaon Moore, Camarillo, CA (US);

Edward Enns Mcentire, Kingsport, TN (US);

Inventors:

Michael Wayne Quillen, Kingsport, TN (US);

Dale Edward O'Dell, Blountville, TN (US);

Zachary Philip Lee, Conyers, GA (US);

John Cleaon Moore, Camarillo, CA (US);

Edward Enns McEntire, Kingsport, TN (US);

Assignee:

Eastman Chemical Company, Kingsport, TN (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
Abstract

Compositions and methods useful for the removal of organic substances from substrates, for example, electronic device substrates such as microelectronic wafers or flat panel displays, are provided. A method is presented which applies a minimum volume of the composition as a coating to the inorganic substrate whereby sufficient heat is added and immediately rinsed with water to achieve complete removal. These compositions and methods are particularly suitable for removing and completely dissolving photoresists of the positive and negative varieties as well as thermoset polymers from electronic devices.


Find Patent Forward Citations

Loading…