The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2013
Filed:
Feb. 02, 2011
Applicant:
Masatoshi Furuichi, Kitakyushu, JP;
Inventor:
Masatoshi Furuichi, Kitakyushu, JP;
Assignee:
Kabushiki Kaisha Yaskawa Denki, Kitakyushu-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); B25J 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
This substrate transport hand includes a first receiving portion and a second receiving portion capable of receiving a first substrate and a second substrate thereon respectively, a third receiving portion supporting the first substrate received on the first receiving portion along with the first receiving portion, and a fourth receiving portion movably provided on a hand body portion for supporting the second substrate received on the second receiving portion along with the second receiving portion when moved to a first position of the hand body portion.