The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Aug. 25, 2011
Matthew I. Egbe, West Norriton, PA (US);
Michael Walter Legenza, Bellingham, MA (US);
Thomas Michael Weider, Emmaus, PA (US);
Jennifer May Rieker, Whitehall, PA (US);
Matthew I. Egbe, West Norriton, PA (US);
Michael Walter Legenza, Bellingham, MA (US);
Thomas Michael Weider, Emmaus, PA (US);
Jennifer May Rieker, Whitehall, PA (US);
Air Products and Chemicals, Inc., Allentown, PA (US);
Abstract
A composition comprising one or more water soluble organic solvents comprising a glycol ether; water; a fluoride containing compound provided that if the fluoride containing compound is ammonium fluoride than no additional fluoride containing compound is added to the composition; optionally a quaternary ammonium compound; and optionally a corrosion inhibitor is disclosed herein that is capable of removing residues from an article such as photoresist and/or etching residue. Also disclosed herein is a method for removing residues from an article using the composition disclosed herein.