The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
May. 20, 2011
Kathryn C. Fisher, Brooklyn, NY (US);
Jun Liu, Irvington, NY (US);
Satyavolu S. Papa Rao, Poughkeepsie, NY (US);
George G. Totir, Newtown, CT (US);
James Vichiconti, Peekskill, NY (US);
Kathryn C. Fisher, Brooklyn, NY (US);
Jun Liu, Irvington, NY (US);
Satyavolu S. Papa Rao, Poughkeepsie, NY (US);
George G. Totir, Newtown, CT (US);
James Vichiconti, Peekskill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
Alternative additives that can be used in place of isopropyl alcohol in aqueous alkaline etchant solutions for texturing a surface of a single-crystalline silicon substrate are provided. The alternative additives do not have volatile constituents, yet can be used in an aqueous alkaline etchant solution to provide a pyramidal shaped texture surface to the single-crystalline silicon substrate that is exposed to such an etchant solution. Also provided is a method of forming a textured silicon surface. The method includes immersing a single-crystalline silicon substrate into an etchant solution to form a pyramid shaped textured surface on the single-crystalline silicon substrate. The etchant solution includes an alkaline component, silicon (etched into the solution as a bath conditioner) and glycerol or ethylene glycol as an additive. The textured surface of the single-crystalline silicon substrate has (111) faces that are now exposed.