The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Feb. 20, 2003
Diego Fischer, Neuchatel, CH;
Pedro Torres, Neuchatel, CH;
Diego Fischer, Neuchatel, CH;
Pedro Torres, Neuchatel, CH;
VHF Technologies SA, Le Locle, CH;
Abstract
Apparatus for continuously producing flexible semiconductor devices through deposition of a plurality of semiconductor layers onto a moving flexible substrate by using Plasma Enhanced Chemical Vapor Deposition (PECVD) processing, where at least two successive layers are deposited in the same deposition chamber onto the substrate traveling in opposite directions. Computer program product directly loadable into the internal memory of a digital computer comprising software code portions for determining and controlling all the necessary parameters for the production of flexible semi-conductor devices in a such apparatus when said computer program product is run on a computer. Roll-to-roll method for producing flexible semiconductor devices, wherein a plurality of semiconductor layers are deposited in the same deposition chamber onto a flexible substrate moving in opposite directions. Flexible semiconductor device produced with said method, where the penetration rate of one semiconductor layer into its neighboring layer is remarkably low.