The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2013
Filed:
Oct. 21, 2010
Shengming HU, Shenzhen, CN;
Yi LI, Shenzhen, CN;
Zhubing He, Shenzhen, CN;
Zhijian LI, Shenzhen, CN;
Jianhua Zhou, Shenzhen, CN;
Chunzhu Wang, Shenzhen, CN;
Shengming Hu, Shenzhen, CN;
Yi Li, Shenzhen, CN;
Zhubing He, Shenzhen, CN;
Zhijian Li, Shenzhen, CN;
Jianhua Zhou, Shenzhen, CN;
Chunzhu Wang, Shenzhen, CN;
Shenzhen TRONY Science & Technology Development Co., Ltd., Shenzhen, CN;
Abstract
The present invention discloses a surface feed-in electrode structure for thin film solar cell deposition, relating to solar cell technologies. The surface feed-in electrode structure uses a signal feed-in component with a flat waist and a semicircular feed-in end to connect the signal feed-in port by surface contact. The signal feed-in port is located in a hallowed circular area of a center of the backside of a cathode plate, and feeds in an RF/VHF power supply signal. An anode plate is grounded. The cathode plate is insulated with a shielding cover, and a through-hole is configured on the shielding cover. The effects include that, by using the surface feed-in at the center of the electrode plate, the feeding line loss of single-point or multi-point feed-in configurations can be overcome. Uniform large area and stable discharge driven by the RF/VHF power supply signal can be achieved, and the standing wave and the skin effect can be effectively removed. The production efficiency can be improved and the cost can be reduced.