The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Mar. 08, 2007
Applicant:
Hiroyuki Iwakura, Toyama, JP;
Inventor:
Hiroyuki Iwakura, Toyama, JP;
Assignee:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04L 29/06 (2006.01);
U.S. Cl.
CPC ...
Abstract
A substrate processing system capable of making it easy to set an operation authority in a plurality of substrate processing apparatuses and a management device is provided. In a substrate processing system including a plurality of substrate processing apparatuses for executing a process on a wafer, a management device connected to the plurality of substrate processing apparatuses via a communication line, the management device has a display screen for setting an operation authority to each of the management device and the plurality of substrate processing apparatuses capable of communicating with the management device for each user.