The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Mar. 22, 2012
Satomi Nakamura, Yokohama, JP;
Toshiya Kotani, Machida, JP;
Kazuhito Kobayashi, Chigasaki, JP;
Akiko Mimotogi, Yokohama, JP;
Chikaaki Kodama, Yokohama, JP;
Satomi Nakamura, Yokohama, JP;
Toshiya Kotani, Machida, JP;
Kazuhito Kobayashi, Chigasaki, JP;
Akiko Mimotogi, Yokohama, JP;
Chikaaki Kodama, Yokohama, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, an original plate evaluation method is disclosed. The original plate includes a substrate and N patterns differing from one another in shape. The method includes selecting N1 patterns from the N patterns based on first criterion, obtaining measured values for the N1 patterns, performing a decision whether the obtained measured values satisfy first specification value, selecting N2 patterns from the N patterns based on second criterion, predicting shapes of transfer patterns corresponding to N2 patterns, performing a decision whether the predicted shapes satisfy second specification value, and evaluating the plate based on the decision.