The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Dec. 17, 2010
Andrei Brunfeld, Cupertino, CA (US);
Gregory Toker, Jerusalem, IL (US);
Bryan Clark, Mountain View, CA (US);
Andrei Brunfeld, Cupertino, CA (US);
Gregory Toker, Jerusalem, IL (US);
Bryan Clark, Mountain View, CA (US);
Xyratex Technology Limited, Havant, Hampshire, GB;
Abstract
An optical inspection system includes a polarizing isolator that reduces error in measurements by preventing ghost light reflected or scattered from element of a detection subsystem from re-entering the illumination and detection optical paths. The polarizing isolator may include a polarizing splitter that isolates light directionally according the a linear polarization state and two quarter-wave plates for transforming linearly polarized light to circularly polarized light.