The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Jan. 15, 2011
Applicants:
Martin M. Liphardt, Lincoln, NE (US);
Jeffrey S. Hale, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Galen L. Pfeiffer, Lincoln, NE (US);
Inventors:
Martin M. Liphardt, Lincoln, NE (US);
Jeffrey S. Hale, Lincoln, NE (US);
Ping He, Lincoln, NE (US);
Galen L. Pfeiffer, Lincoln, NE (US);
Assignee:
J.A. Woollam Co., Inc, Lincoln, NE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.