The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Jun. 12, 2009
Choon Meng Chua, Singapore, SG;
Lian Ser Koh, Singapore, SG;
Wah Pheng Chua, Singapore, SG;
Chee Hong Jacob Phang, Singapore, SG;
Soon Huat Tan, Singapore, SG;
Choon Meng Chua, Singapore, SG;
Lian Ser Koh, Singapore, SG;
Wah Pheng Chua, Singapore, SG;
Chee Hong Jacob Phang, Singapore, SG;
Soon Huat Tan, Singapore, SG;
Semicaps Pte Ltd, Singapore, SG;
Abstract
A wafer stage and a method of supporting a wafer for inspection. the wafer stage comprises a platform for supporting a wafer such that a backside of the wafer is suspended above a cavity of the platform; and a support structure disposed substantially within the cavity for supporting a portion of the wafer; wherein the wafer stage is adapted for relative movement of the platform with respect to the support structure for alignment of the wafer with respect to a probe.