The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2013
Filed:
Mar. 15, 2012
Yoshiro Shiokawa, Hachioji, JP;
Megumi Nakamura, Tama, JP;
Qiang Peng, Tama, JP;
Canon Anelva Corporation, Kawasaki-Shi, JP;
Abstract
The present invention provides a device for measuring a mean free path capable of measuring directly the mean free path of a charged particle, a vacuum gauge, and a method for measuring a mean free path. The device for measuring a mean free path according to one embodiment of the invention includes an ion source for generating an ion, a collector () for detecting the number of first charged particles being charged particles having a first flight distance Lthat is a flight distance of zero or more from the ion source, and a collector () for detecting the number of second charged particles having a second flight distance longer than the first flight distance. The control part of the device calculates the mean free path from a ratio between the numbers of the first and second charged particles.